Title:
METHOD OF FORMING CARBON NANOTUBE ON SUBSTRATE, METHOD OF FORMING CONDUCTING WIRE UTILIZING SAME, AND MANUFACTURING METHOD OF INDUCTOR ELEMENT UTILIZING SAME
Document Type and Number:
Japanese Patent JP2007063116
Kind Code:
A
Abstract:
To provide a method of manufacturing an element, in more details, to provide a method of manufacturing an element through filling a groove with a carbon nanotube.
The manufacturing method of an element comprises a step of patterning a mold on a substrate, a step of applying a carbon nanotube in the groove formed by the patterning and on the whole surface of the mold, a step of filling the groove with the carbon nanotube applied on the whole surface of the mold, and a step for removing the mold.
Inventors:
LEE BYONCHORU
LEE JEONG OEN
CHOI YANG-KYU
YOON JUN BO
LEE JEONG OEN
CHOI YANG-KYU
YOON JUN BO
Application Number:
JP2006192551A
Publication Date:
March 15, 2007
Filing Date:
July 13, 2006
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH
International Classes:
C01B31/02
Attorney, Agent or Firm:
Global IP Tokyo Patent Business Corporation