Title:
METHOD OF FORMING FERRODIELECTRIC FILM, AND HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2010147266
Kind Code:
A
Abstract:
To provide a method of forming a ferrodielectric film for providing uniform piezoelectric characteristics, and also to provide a heat treatment apparatus for providing uniform characteristics of objects.
A ferrodielectric precursor film is formed on a substrate 1. The ferrodielectric film is formed next by heating the ferrodielectric precursor film. Finally, the ferrodielectric film is cooled by blowing the cooling gas 4 to the entire part of the surface and backside of the substrate 1.
COPYRIGHT: (C)2010,JPO&INPIT
Inventors:
ITO MAKI
Application Number:
JP2008323322A
Publication Date:
July 01, 2010
Filing Date:
December 19, 2008
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/316; H01L21/31; H01L21/8246; H01L27/105; H01L41/18; H01L41/187; H01L41/317; H01L41/39; H01L41/43
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka
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