To provide a method for forming a film of an optical filter, which can inexpensively manufacture the optical filter that is hardly distorted in the manufacture or with elapsed time, with a simple method.
The method for forming the film on the top surface and the back surface of a substrate plate respectively in the same batch includes: a substrate-setting step of setting a substrate holder having the substrate plate mounted thereon on a substrate drum which is rotatably arranged in a chamber; a surface film-forming step of forming a film on the surface of the substrate plate which has been set on the substrate drum, while rotating the above substrate drum, by applying a sputtering voltage to the target; a surface to be film-formed reversing step of rotating the substrate holder in a state of not applying the sputtering voltage to the target to arrange the back surface of the substrate plate so as to face to the target, after the above surface film-forming step; and a back-surface film-forming step of forming the film on the back surface of the substrate plate, while rotating the substrate drum by applying the sputtering voltage to the target, after the top and rear surface of the above substrate plate have been reversed.
Koji Mizuno
Amada Masayuki
Yoshimasa Okada
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