Title:
METHOD FOR FORMING MULTIDOT DIFFRACTION GRATING ARRAY AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3232951
Kind Code:
B2
Abstract:
PURPOSE: To provide a method and device for forming a multidot diffraction grating array capable of forming the large-area multidot diffraction grating array at a high speed and low cost with lessened manpower and relatively easily forming the intricate multidot diffraction grating array with a high degree of freedom.
CONSTITUTION: The multidot diffraction grating array consisting of the sets of diffraction grating elements of dot units is formed by exposing and imaging at least one kind of mask plates 6 having apertures 16 for regulating a dot frame and an original plate 5 having prescribed grating patterns 15 onto a photosensitive material 7 on a stage 19 to be scanned in X, and Y-directions by using a light source 2 and an imaging optical system, such as zoom lens 17 and imaging lens. The multidot diffraction grating arrays having various kinds of dot areas (A), diffraction grating orientation and diffraction grating pitch are produced by changing the movement of the photosensitive material 7, the rotation of the original plate 5 and the mask plates and the magnification of the zoom lens 17, etc.
Inventors:
Susumu Takahashi
Application Number:
JP7700095A
Publication Date:
November 26, 2001
Filing Date:
April 03, 1995
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G02B5/18; G03H1/30; (IPC1-7): G02B5/18
Domestic Patent References:
| JP6265708A | ||||
| JP5241008A | ||||
| JP339701A | ||||
| JP3164789A | ||||
| JP6463902A |
Attorney, Agent or Firm:
Harutoshi Suzuki
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