To improve the productivity of a piezoelectric actuator and an ink-jet head as much as possible.
A plurality of substrates 41 are prepared, a Pt membrane 42 is formed on all the substrates 41, and a pattern is formed by the membrane 42 to form individual electrodes 24. In this process, the substrates are set to the substrate setting part 51a of a substrate positioning jig 51 to be positioned to each other. Next, PZT membranes and Cr membranes are formed in turn on all the substrates 41 on which the individual electrodes 24 are formed so that piezoelectric elements 23 and common electrodes 22 are formed, and the common electrodes 22 on the substrates 41 and a pressure chamber forming part 55 in which an opening part 55a for the pressure chamber is formed in advance are fixed. In this process, the substrates 41 are positioned to each other by the jig 51. After that, the substrates 41 are removed.
TOMITA KENJI
MATSUO HIROYUKI
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