Title:
METHOD FOR FORMING POLYMER OPTICAL WAVEGUIDE
Document Type and Number:
Japanese Patent JP2006195185
Kind Code:
A
Abstract:
To reduce the yield of a branching device in a polymer waveguide forming method with which a film is formed by spin coating.
In the method for forming a polymer waveguide, spin coating is performed by arranging all openings of Y-shaped branching parts of a branching device in a wafer, in the direction from the center of the rotary shaft of the spin coating toward the circumference.
Inventors:
SUZUKI MAKOTO
Application Number:
JP2005006758A
Publication Date:
July 27, 2006
Filing Date:
January 13, 2005
Export Citation:
Assignee:
NITTA KK
International Classes:
G02B6/13
Attorney, Agent or Firm:
Kosaku Sugimura
Kazuaki Takami
Hiroshi Tokunaga
Yoshiyuki Iwasa
Shiro Fujitani
Kiyoshi Kuruma
Kazuyuki Tomita
Kazuaki Takami
Hiroshi Tokunaga
Yoshiyuki Iwasa
Shiro Fujitani
Kiyoshi Kuruma
Kazuyuki Tomita