Title:
METHOD OF FORMING RESIST IMAGE
Document Type and Number:
Japanese Patent JPS54153576
Kind Code:
A
Inventors:
NISHIOKA KIYUUSAKU
SHINOZAKI TOSHIAKI
SHINOZAKI TOSHIAKI
Application Number:
JP6298378A
Publication Date:
December 03, 1979
Filing Date:
May 25, 1978
Export Citation:
Assignee:
CHO LSI GIJUTSU KENKYU KUMIAI
International Classes:
H01L21/027; H01L21/302; (IPC1-7): H01L21/302