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Title:
METHOD FOR GROWING SILICON CARBIDE SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPH06183897
Kind Code:
A
Abstract:

PURPOSE: To provide a sublimation method for the growth of a silicon carbide single crystal free from impurity contamination, crystal defects, etc., keeping the polymorphism of the seed crystal and having high quality.

CONSTITUTION: A crucible 1 is heated with a heater 5 to apply a prescribed temperature gradient to the crucible. When the part holding the raw material powder 2 is heated to a sublimable temperature range and the part holding a seed crystal 4 is heated to a temperature range to enable the growth of crystal, the crucible 1 is shifted with an operation shaft 9 to expose the seed crystal 4 to a sublimable temperature atmosphere. The state is maintained for a prescribed period to remove the surface layer of the seed crystal 4 by sublimation. The cleaned seed crystal 4 is transferred to the temperature range to enable the crystal growth and the crystal growth is started. Since a single crystal is grown on the cleaned surface of the seed crystal 4, the polymorphism of the seed crystal 4 is succeeded as it is to the grown crystal to obtain a silicon carbide single crystal free from impurity contamination, crystal defects, etc., and having stoichiometrical uniformity and high quality.


Inventors:
MAEDA YASUHIRO
Application Number:
JP35468192A
Publication Date:
July 05, 1994
Filing Date:
December 16, 1992
Export Citation:
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Assignee:
NISSHIN STEEL CO LTD
International Classes:
C30B23/00; C30B29/36; (IPC1-7): C30B29/36; C30B23/00
Attorney, Agent or Firm:
Nobuhiro Kobashi (1 outside)