Title:
薄板の保持搬送方法
Document Type and Number:
Japanese Patent JP4190065
Kind Code:
B2
Inventors:
Katsutoshi Tamiya
Kunio Miyawaki
Kenji Uekawa
Shoichi Nakatsu
Shinji Furusawa
Kunio Miyawaki
Kenji Uekawa
Shoichi Nakatsu
Shinji Furusawa
Application Number:
JP30152498A
Publication Date:
December 03, 2008
Filing Date:
October 23, 1998
Export Citation:
Assignee:
Hitachi Zosen Corporation
Hitz high technology inc.
Hitz high technology inc.
International Classes:
B65G49/06; H01L21/677; B25J15/08
Domestic Patent References:
| JP4223886A | ||||
| JP6246576A | ||||
| JP6255772A | ||||
| JP10114426A |
Attorney, Agent or Firm:
Yoshihiro Morimoto