To provide a method for enabling visual, intuitive recognition of the behavior of bulk micro defect (BMD) by displaying the behavior of BMD by computer simulation as the image represented by the infra-red tomographic method.
The method of imaging to display BMD in the semiconductor single crystal using the computer comprises an input process of inputting into the computer, the information about the density of BMD in the semiconductor single crystal prepared by computer simulation in advance a calculation process of calculating the number of pieces of BMD in a display area by multiplying the above density by the volume corresponding to the display area of a display device a coordinate generation process of generating the position coordinates of BMD in the display area corresponding to the number of pieces using random numbers and an output process of displaying into a display device, BMD in the display area as an image according to the position coordinates.
Tetsuma Ikegami
Akira Sudo