Title:
SiC単結晶の製造方法
Document Type and Number:
Japanese Patent JP4833798
Kind Code:
B2
Inventors:
Kohei Tatsumi
Taizo Hoshino
Tatsuo Fujimoto
Masakazu Katsuno
Noboru Otani
Masashi Nakabayashi
Hiroshi Tsuge
Yoshio Hirano
Hirokatsu Yashiro
Taizo Hoshino
Tatsuo Fujimoto
Masakazu Katsuno
Noboru Otani
Masashi Nakabayashi
Hiroshi Tsuge
Yoshio Hirano
Hirokatsu Yashiro
Application Number:
JP2006299036A
Publication Date:
December 07, 2011
Filing Date:
November 02, 2006
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
C30B29/36; H01L21/203
Domestic Patent References:
| JP2000034199A | ||||
| JP10182296A | ||||
| JP2006290705A | ||||
| JP2000034200A |
Attorney, Agent or Firm:
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki