Title:
アルミニウム含有感光性組成物および電極の製造方法
Document Type and Number:
Japanese Patent JP5347665
Kind Code:
B2
Inventors:
Kudo Kazuo
Ueda Masahiro
Nami Onimaru
Ueda Masahiro
Nami Onimaru
Application Number:
JP2009092805A
Publication Date:
November 20, 2013
Filing Date:
April 07, 2009
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/004; H01J9/02; H01J11/12; H01J11/22; H01J11/24; H01J11/26; H01J11/34
Domestic Patent References:
| JP10333322A | ||||
| JP2009037232A | ||||
| JP2006126354A | ||||
| JP2004177597A | ||||
| JP2009186643A | ||||
| JP2003162049A | ||||
| JP2004325980A |
Attorney, Agent or Firm:
Patent corporation ssinpat
Koji Makimura
Chihata Takahata
Koji Makimura
Chihata Takahata