To solve the problem that, since temperatures of a vacuum drying chamber opening/closing door and its neighborhood are lower than that of an inner wall of a vacuum drying chamber, continuous vacuum drying in a step of evaporating a solvent of a resin coating film in the vacuum drying chamber under reduced pressure causes the partial reduction of a coating film drying speed to likely leave the solvent in the coating film and results in partial variation of dimensions and partial pattern dropout, namely, failure in accurate pattern processing in a step of developing the resin coating film.

A method of manufacturing a substrate for a liquid crystal display device includes the steps of: applying a polymer solution containing at least a polymer and a solvent, on a substrate; and drying the substrate having had the polymer solution applied thereon, in a vacuum drying chamber under reduced pressure. The method further includes a step of returning the pressure in the vacuum drying chamber to an atmospheric pressure by warm air at 40°C or higher after the substrate having had the polymer solution applied thereon is dried in the vacuum drying chamber under reduced pressure.