To provide a method for manufacturing a dielectric barrier discharging electrode capable of exerting an expected performance from a physical property of a dielectric material by restraining defects of a dielectric substance.
A method for manufacturing a dielectric barrier discharging electrode 10 comprises: a first step for molding a powdery dielectric particle to obtain a molding with a predetermined shape; a second step for heating the molding to obtain a substrate base material made of a dielectric substance; a third step for obtaining a discharging electrode structure 7, in which a conductive electrode film 5 is formed on one entire face of the substrate base material or a plate-like substrate 4 obtained from the substrate base material; a fourth step for obtaining a large number of through holes 6 across top and rear surfaces of the discharging electrode structure 7; and a fifth step for nipping and integrating an annular insulator 9 positioned on outer peripheral edges of substrate exposure faces 8 and having an opening on a center of the substrate exposure faces 8 between a pair of opposed faces, while the substrate exposure faces 8 of the discharging electrode structures 7 are opposed to each other using a pair of discharging electrode structures 7.
MATSUSHITA ISAO
JP2009081134A | 2009-04-16 | |||
JP2006210178A | 2006-08-10 |
Kunihiko Higashi
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