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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING DISPLAY PANEL
Document Type and Number:
Japanese Patent JP2006039417
Kind Code:
A
Abstract:

To provide a method for manufacturing a display panel by which film reduction (Al dissolution) or (Al) surface corrosion is prevented, for example, when a resist layer used as a mask is removed by stripping after an aluminum monolayer film is etched.

The method includes an electrode forming process including a step of forming an aluminum film on a substrate, forming a resist mask layer corresponding to a predetermined electrode pattern on the aluminum film, etching a part of the aluminum film exposing through the resist mask layer, and stripping the resist mask layer with a stripping liquid. In a step of removing a resist mask layer, a striping liquid containing a corrosion inhibitor for the aluminum film is used for the stripping liquid. The corrosion inhibitor is preferably sodium hydrogen phosphate (NaH2PO4), and the content of the sodium hydrogen phosphate (NaH2PO4) in the stripping liquid is preferably 0.05 to 30 wt.%.


Inventors:
FUJIMORI JIRO
KATO KOICHIRO
Application Number:
JP2004222322A
Publication Date:
February 09, 2006
Filing Date:
July 29, 2004
Export Citation:
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Assignee:
PIONEER ELECTRONIC CORP
International Classes:
G03F7/42; G09F9/00; H01J9/02; H01J11/02; H01J11/22; H01J11/34
Attorney, Agent or Firm:
Teruo Naito