Title:
METHOD FOR MANUFACTURING LIGHT-EMITTING DIODE CHIP AND LIGHT-EMITTING DIODE CHIP
Document Type and Number:
Japanese Patent JP2018148016
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a light-emitting diode chip capable of obtaining sufficient luminance, and the light-emitting diode chip.SOLUTION: A method for manufacturing a light-emitting diode chip comprises: a wafer preparing step of preparing a wafer which includes a laminate layer in which a plurality of semiconductor layers including light-emitting layers are formed on a transparent substrate for crystal growth, and in which an LED circuit 19 is formed in each of regions partitioned by a plurality of division schedule lines mutually crossing a surface of the laminate layer; a transparent substrate processing step of forming a plurality of grooves 23B corresponding to the LED circuits on a surface or a rear surface of at least one of a first and second transparent substrates in which a plurality of air bubbles are formed inside; a transparent substrate sticking step of forming an integrated wafer by sticking a surface of the first transparent substrate to a rear surface of the wafer and a surface of the second transparent substrate to a rear surface of the first transparent substrate; and a dividing step of dividing the integrated wafer into individual light-emitting diode chips 31 by cutting the wafer together with the first transparent substrate and the second transparent substrate along the division schedule lines.SELECTED DRAWING: Figure 9
Inventors:
OKAMURA TAKU
Application Number:
JP2017041315A
Publication Date:
September 20, 2018
Filing Date:
March 06, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L33/20; B23K26/364; B23K26/53; B24B27/06; B24C1/00; B24C3/32; H01L21/301; H01L33/02
Domestic Patent References:
| JP2016521463A | 2016-07-21 | |||
| JP2012099788A | 2012-05-24 | |||
| JP2005093728A | 2005-04-07 | |||
| JP2015018953A | 2015-01-29 | |||
| JP2014239123A | 2014-12-18 |
Foreign References:
| WO2013114480A1 | 2013-08-08 | |||
| US20140159090A1 | 2014-06-12 | |||
| KR101662751B1 | 2016-10-07 | |||
| KR20150062194A | 2015-06-08 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro