Title:
METHOD OF MANUFACTURING MATERIAL FOR CERAMIC PACKAGE
Document Type and Number:
Japanese Patent JP2003158222
Kind Code:
A
Abstract:
To easily and surely form a uniform colored layer that is free from color shading on the surface of a sintered AlN compact without compromising the intrinsic high thermal conductivity of AlN.
The colored layer composed of a colored ceramic compound, such as SiC, TaN, etc., is formed on the surface of the sintered AlN compact by a sputtering method.
Inventors:
INOUE TORU
Application Number:
JP2002306221A
Publication Date:
May 30, 2003
Filing Date:
November 24, 1992
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
C04B41/87; C23C14/34; H01L23/15; (IPC1-7): H01L23/15; C04B41/87; C23C14/34
Attorney, Agent or Firm:
Hironobu Onda (1 person outside)