Title:
METHOD OF MANUFACTURING MICRO CONCAVO-CONVEX STRUCTURE, AND SUBSTRATE
Document Type and Number:
Japanese Patent JP2016050978
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro concavo-convex structure, which involves forming a micro concavo-convex structure having a concavo-convex pattern with different pitches and levels on a substrate, and to provide a substrate with a micro concavo-convex structure having a concavo-convex pattern with different pitches and levels formed on a surface thereof.SOLUTION: A manufacturing method for a micro concavo-convex structure includes; a surface layer forming step for performing energy irradiation or thin-film material deposition on an elastic substrate while changing an energy irradiation amount or thin-film material deposition amount depending on regions of the substrate to form a surface layer that depends of the energy irradiation amount or thin-film material deposition amount; and a micro concavo-convex structure forming step for applying lateral stress to the surface layer to form a micro concavo-convex structure having a concavo-convex pattern with different levels and/or pitches on the substrate.SELECTED DRAWING: Figure 1
Inventors:
ENDO YOJI
KAWAI TAKESHI
TSUJI TAMAMI
KAWAI TAKESHI
TSUJI TAMAMI
Application Number:
JP2014174780A
Publication Date:
April 11, 2016
Filing Date:
August 29, 2014
Export Citation:
Assignee:
UNIV OF SCIENCE TOKYO
International Classes:
G02B1/10; B29C59/14; B29C59/16; B29C59/18; B32B3/30; B32B37/00; G02B5/02
Attorney, Agent or Firm:
Masayuki Masabayashi
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