Title:
マイクロレンズアレイ製造用金型の作製方法
Document Type and Number:
Japanese Patent JP6794308
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a mold for manufacturing a micro lens array capable of manufacturing a mold capable of manufacturing a microlens array with high precision with high spherical shape accuracy.SOLUTION: A resist mask having a pattern of a microlens array to be manufactured is formed on one surface of a substrate, selective etching of the substrate via the resist mask and slimming of the resist mask are repeated a plurality of times to form temporary recesses corresponding to the microlenses on the substrate, by removing the resist mask from the substrate and etching the substrate, the temporary concave portion is used as a manufacturing concave portion, thereby solving the problem.SELECTED DRAWING: Figure 1
Inventors:
Takashi Yakushiji
Application Number:
JP2017088383A
Publication Date:
December 02, 2020
Filing Date:
April 27, 2017
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
B29C33/38; B29C59/02
Domestic Patent References:
| JP2012051175A | ||||
| JP2008158013A | ||||
| JP2011141476A | ||||
| JP2003043209A | ||||
| JP2007010802A | ||||
| JP2007101834A |
Foreign References:
| WO2016102628A1 |
Attorney, Agent or Firm:
Hideaki Ito
Fumio Mitsuhashi
Fumio Mitsuhashi