Title:
METHOD FOR MANUFACTURING MULTILAYER PIEZOELECTRIC CERAMIC ELEMENT
Document Type and Number:
Japanese Patent JP2003192436
Kind Code:
A
Abstract:
To provide a method for manufacturing a piezoelectric ceramic element having excellent piezoelectric characteristics and showing high reliability.
The method includes: a process of applying a conductive paste containing an alloy essentially comprising Ag on a ceramic green sheet of a piezoelectric ceramic material containing a compound of Pb element and stacking the ceramic green sheets to form a layered body; and a process of calcining the layered body in an atmosphere having ≥21 vol.% of the oxygen concentration in the temperature elevating stage and the temperature holding stage during calcination and 0.05 to 3 vol.% of the oxygen concentration in the temperature decreasing stage.
Inventors:
KACHI TOSHIAKI
YOSHINO YOSHIMASA
OMIYA SUETAKE
YOSHINO YOSHIMASA
OMIYA SUETAKE
Application Number:
JP2001394060A
Publication Date:
July 09, 2003
Filing Date:
December 26, 2001
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
C04B35/49; C04B35/491; C04B35/64; H01L41/083; H01L41/187; H01L41/22; H01L41/39; H01L41/43; (IPC1-7): C04B35/49; C04B35/64; H01L41/083; H01L41/187; H01L41/22; H01L41/24
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