Title:
METHOD OF MANUFACTURING NEGATIVE TYPE PHOTOMASK BY WAY OF NEW LIFT OFF PROCESS
Document Type and Number:
Japanese Patent JPS5293274
Kind Code:
A
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Inventors:
SUZUKI EIICHI
TERUNUMA HIROAKI
TERUNUMA HIROAKI
Application Number:
JP968276A
Publication Date:
August 05, 1977
Filing Date:
January 31, 1976
Export Citation:
Assignee:
TOPPAN PRINTING CO LTD
International Classes:
G03F1/00; G03F1/68; G03F1/80; H01L21/027; H01L21/308; (IPC1-7): H01L21/308