Title:
光共振器及び光変調器の作製方法
Document Type and Number:
Japanese Patent JP7100906
Kind Code:
B2
Abstract:
To improve reflectance of a reflection film or finess of a resonator by suppressing chipping or warping of a corner of a waveguide end surface at a time of working the corner and causing the reflection film to be stably deposited without being peeled off at a corner part of an end surface uppermost part for each reflection film.SOLUTION: An optical resonator is provided with: resonance means that is composed of an incidence side reflection film 93 and an emission side reflection film 94, and resonates light incident via the incidence side reflection film 93; a waveguide 12 that is formed so as to penetrate from the incidence side reflection film 93 over the emission side reflection film 94, and propagates the resonated light; a substrate 11 for causing the waveguide 12 to be formed from a top surface; and end surface protection means that causes first and second protection members 86 and 87 corresponding to a material of the substrate 11 to be disposed on an upper part of the waveguide 12 so that at least one end surfaces of the protection members form surfaces 91 and 92 flush with a first end surface 84 and a second end surface 85 of the substrate 11 including a light incidence end or light emission end in the waveguide 12, in which the incidence side reflection film 93 and the emission side reflection film 94 are formed depositedly on the surfaces 91 and 92 vertical to the waveguide 12 respectively under a temperature condition lower than a heatproof temperature of an adhesive as a single-layer or multi-layer vapor phase growth film.SELECTED DRAWING: Figure 1
Inventors:
Kazuhiro Imai
Motonobu Korogi
Mark Jaboron Ski
Motonobu Korogi
Mark Jaboron Ski
Application Number:
JP2020099226A
Publication Date:
July 14, 2022
Filing Date:
June 08, 2020
Export Citation:
Assignee:
Xtia Co., Ltd.
International Classes:
G02F1/035; G02B6/13; H01S3/063
Domestic Patent References:
| JP4781648B2 | ||||
| JP7058386A | ||||
| JP55045070A | ||||
| JP2004206068A | ||||
| JP2001125157A | ||||
| JP2118605A | ||||
| JP7027931A | ||||
| JP11352350A | ||||
| JP58035501A |
Foreign References:
| WO2007114367A1 | ||||
| US20090297087 |
Attorney, Agent or Firm:
Akira Koike
Takaaki Kono
Hiroyuki Murakami
Takaaki Kono
Hiroyuki Murakami
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