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Title:
METHOD FOR MANUFACTURING ORGANIC TRANSISTOR
Document Type and Number:
Japanese Patent JP2010238869
Kind Code:
A
Abstract:

To provide a method for manufacturing an organic transistor, capable of improving the smoothness of the interface of a gate insulating layer and an organic semiconductor layer and obtaining satisfactory transistor characteristics.

This organic transistor is manufactured by: a gate electrode formation process for forming a gate electrode 3 on a substrate 2; a gate insulating layer formation process for forming a gate insulating layer 4 on the gate electrode 3; a cleaning process for cleaning the surface of the gate insulating layer 4; a smoothed layer formation process for forming a smoothed layer 5 by applying a coating solution for forming a smoothed layer on the washed gate insulating layer 4; an organic semiconductor layer formation process for forming an organic semiconductor layer 8 on the smoothed layer; and a source/drain electrode formation process for forming a source electrode 6 and a drain electrode 7 so that they can be brought into contact with the organic semiconductor layer 8, with a channel region 13 interposed therebetween.


Inventors:
HONDA HIROYUKI
SARUWATARI NAOKO
MAEDA HIROMI
Application Number:
JP2009084477A
Publication Date:
October 21, 2010
Filing Date:
March 31, 2009
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
H01L21/336; H01L29/786; H01L51/05; H01L51/40
Domestic Patent References:
JP2008034529A2008-02-14
JP2007071928A2007-03-22
Foreign References:
WO2006098416A12006-09-21
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto