To provide a high-precision size controlling method in the manufacturing of photomask.
The method for manufacturing photomask comprising forming a resist pattern and patterning the light-shielding layer by dry etching using the resist pattern as a mask, includes, after forming a resist pattern, a first control step ST-6 and a second control step ST-7. The ST-6 comprises measuring the size of the resist pattern (ST6-1), predicting the size of a light-shielding pattern from the result of the ST6-1 (ST6-2), and correcting a deviation from a finished measurement by changing at least one of the two process conditions, descum (ST6-3) and dry-etching (ST6-4). The ST-7 comprises measuring the size of a light-shielding pattern with resist after dry etching and before removing the resist (ST7-1), predicting the size of the light-shielding pattern from the result of the ST7-1 (ST7-2), and correcting a deviation from a finished dimension by additional dry-etching (ST7-3).
YOKOYAMA HISAFUMI
JPH07152147A | 1995-06-16 | |||
JPH1098023A | 1998-04-14 | |||
JPH05323564A | 1993-12-07 | |||
JPH05100411A | 1993-04-23 | |||
JPS6331132A | 1988-02-09 | |||
JPH1090116A | 1998-04-10 |