To provide a method for manufacturing a planer type actuator, excellent in the productivity without spoiling the handleability.

The planer type actuator comprises an actuator section 1 for rotatably supporting a movable section on an outside frame portion by means of a beam portion, and a supporting section provided on one surface of the outside frame portion to support the actuator section 1. The method for manufacturing the planer type actuator includes a process for forming a composite substrate 15 by laminating a silicon substrate 7 for forming an actuator portion on a supporting substrate 14 for forming the supporting section having a second through hole 9 formed beforehand, and a process for carrying out machining of the movable section of the actuator section 1 and the beam portion on the position of the silicon substrate 7 corresponding to the second through hole 9 of the composite substrate 15.