Title:
圧力センサ及び圧力センサの製造方法
Document Type and Number:
Japanese Patent JP4511844
Kind Code:
B2
Abstract:
An inexpensive and simple pressure sensor having good static pressure characteristics is provided. In a pressure sensor including a base having a hole to which a pressure is applied and performing electrical and mechanical insulation, and a sensor having a diaphragm connected to the hole and a strain gauge for converting a strain occurring in the diaphragm to an electric signal, the sensor being mounted to the base, the base is formed with such a thickness that the strain at the time of applying a static pressure does not change.
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Inventors:
Akayuki Kato
Toshiyuki Sarutani
Toshiyuki Sarutani
Application Number:
JP2004028853A
Publication Date:
July 28, 2010
Filing Date:
February 05, 2004
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01L9/00; G01L7/00; G01L9/06; G01L19/06; H01L29/84
Domestic Patent References:
| JP2595829B2 | ||||
| JP2000121469A |