Title:
保護膜形成用フィルム、保護膜形成用シートおよび半導体チップの製造方法
Document Type and Number:
Japanese Patent JP5727835
Kind Code:
B2
Inventors:
Tomonori Shinoda
Takeshi Takano
Yuichiro Azuma
Takeshi Takano
Yuichiro Azuma
Application Number:
JP2011075569A
Publication Date:
June 03, 2015
Filing Date:
March 30, 2011
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/301; C09J4/02; C09J7/00; C09J11/06; C09J11/08; C09J201/00
Domestic Patent References:
| JP2002280329A | ||||
| JP2008218930A | ||||
| JP63260971A | ||||
| JP60028318B2 | ||||
| JP2155640A |
Other References:
ネットワークポリマー,2009年,Vol.30,No.5,p.234-249
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation
Hitoshi Maeda
Toru Suzuki
Hitoshi Maeda
Toru Suzuki