To provide a method of manufacturing a solar cell by which a formed film becomes uniform in film quality and film thickness.

The method of manufacturing the solar cell includes a step of forming a photoelectric conversion layer 30 on a substrate 10 with a plasma treatment apparatus including an upper electrode 3 provided in a treatment chamber 2, a lower electrode 5 opposed to one surface of the upper electrode 3 and holding the substrate 10, and a gas supply source supplying gas into the treatment chamber 2. A recess portion 4a having a bottom portion in the form of a curved surface is provided on another surface of the upper electrode 3, while a plurality of through-holes 4b are provided on the bottom portion of the recess portion 4a.