Title:
METHOD FOR MANUFACTURING ULTRAFINE CARBON FIBER AND FIELD EMISSION ELEMENT
Document Type and Number:
Japanese Patent JP2005060920
Kind Code:
A
Abstract:
To provide a method for manufacturing an ultrafine carbon fiber capable of controlling diameter thereof, and to provide a method for manufacturing a field emission element in which an electron emission portion is formed of an ultrafine carbon fiber and which is possible to control the density and the diameter thereof.
A size and density of a metal element or a silicide of the metal element is controlled and cohered in a crystal grain boundary of a semiconductor film, and an ultrafine carbon fiber is formed by using the metal element or the metal silicide as a core.
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Inventors:
ONUMA HIDETO
Application Number:
JP2004218260A
Publication Date:
March 10, 2005
Filing Date:
July 27, 2004
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
D01F9/127; H01J9/02; C01B31/02; (IPC1-7): D01F9/127; C01B31/02; H01J9/02
Domestic Patent References:
| JP2002115071A | 2002-04-19 | |||
| JPH10270363A | 1998-10-09 |
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