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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING WAFER AND WIRE SAW
Document Type and Number:
Japanese Patent JP2007030117
Kind Code:
A
Abstract:

To provide a method for manufacturing a wafer having an excellent warpage characteristic of warp, etc., and also to provide a wire saw for manufacturing the wafer having the excellent warpage characteristic.

In this method for manufacturing the wafer by cutting an ingot by the wire saw, the ingot is cut, while controlling tension of a wire by a tension imparting mechanism according to deflection amount of the wire of an ingot feeding direction at least during cutting of the ingot. The wire saw is used for manufacturing the wafer by pressing the ingot on the wire and cutting the ingot, while moving the wire between rollers. The wire saw is provided with a wire tension imparting mechanism and an arithmetic control unit. The wire tension imparting mechanism imparts tension to the wire. The arithmetic control unit controls tension of the wire by the wire tension imparting mechanism according to the deflection amount of the wire of the ingot feeding direction during the cutting of the ingot.


Inventors:
OISHI HIROSHI
KATO TADAHIRO
Application Number:
JP2005219102A
Publication Date:
February 08, 2007
Filing Date:
July 28, 2005
Export Citation:
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Assignee:
SHINETSU HANDOTAI KK
International Classes:
B24B27/06; B24B49/10; B28D5/04; H01L21/304
Domestic Patent References:
JP2000218502A2000-08-08
JPH09314548A1997-12-09
JP2001232549A2001-08-28
JPH0885053A1996-04-02
JPH11156694A1999-06-15
Foreign References:
WO2005037968A12005-04-28
Attorney, Agent or Firm:
Mikio Yoshimiya