Title:
METHOD FOR MANUFACTURING ZINC OXIDE FILM
Document Type and Number:
Japanese Patent JP2005226131
Kind Code:
A
Abstract:
To provide a method for manufacturing a zinc oxide film capable of obtaining a predetermined electron density.
The zinc oxide film is formed in a film-forming chamber with an ion plating technique. The manufacturing method includes adjusting oxygen partial pressure in the above technique, on the basis of a previously grasped relationship between the electron density in the zinc oxide and the oxygen partial pressure in the film-forming chamber, to control the electron density.
Inventors:
YAMAMOTO TETSUYA
SAKAMI TOSHIYUKI
SHIRAKATA SHO
SAKAMI TOSHIYUKI
SHIRAKATA SHO
Application Number:
JP2004036919A
Publication Date:
August 25, 2005
Filing Date:
February 13, 2004
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
C23C14/08; C23C14/32; (IPC1-7): C23C14/08; C23C14/32
Domestic Patent References:
| JP2003273134A | 2003-09-26 | |||
| JPH07216533A | 1995-08-15 |
Attorney, Agent or Firm:
Tadahiko Ito