Title:
ジルコニア膜の製造方法
Document Type and Number:
Japanese Patent JP6647565
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for depositing a white zirconia film of a thickness of a few dozens μm or more on a substrate.SOLUTION: A production method of a zirconia film includes a crushing step, an aerosol forming step, and an aerosol spraying step. In the crushing step, zirconia powder of which the particle size distribution has a single mountain and a peak in a range of 10-20 μm is crushed by a planetary ball mill. The particle size distribution of the crushed powder is adjusted so as to have two mountains where a first peak is in a range of particle size of 5-15 μm, a second peak lower than the first peak in a range of particle size of 0.2-0.8 μm, and a height ratio of the first peak and the second peak of 5-15, which is a volume ratio of the particles. In the aerosol forming step, an aerosol in which the particles of the zirconia powder prepared in the crushing step are dispersed in a gas is formed in a closed vessel. In the aerosol spraying step, the aerosol is sprayed from the closed vessel toward a substrate put in a film deposition chamber having a lower pressure than the closed vessel.SELECTED DRAWING: Figure 1
Inventors:
Horiuchi Sadao
Jun Akiwatari
Jun Akiwatari
Application Number:
JP2016065588A
Publication Date:
February 14, 2020
Filing Date:
March 29, 2016
Export Citation:
Assignee:
CITIZEN WATCH CO.,LTD.
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
International Classes:
C23C24/04; B05D1/02; B05D3/00; B05D7/24; C04B35/48
Domestic Patent References:
| JP2007314889A | ||||
| JP2004256920A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara
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