Title:
METHOD FOR MEASURING CONCENTRATION OF SULFURIC ACID IN PLATING LIQUID
Document Type and Number:
Japanese Patent JP3843224
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for measuring the concentration of sulfuric acid in a plating liquid by simple operation.
SOLUTION: A measuring instrument is constituted of an absorbancy measuring part A, an electric conductivity measuring part B and a control part C. In the absorbancy measuring part A, a sample measuring cell 10 and a reference measuring cell 11 are irradiated with the light of a light source 12 and the transmitted light is measured by photodetectors 13 and 14 to measure absorbancy. In the electric conductivity measuring part B, the electric conductivity of the plating liquid is measured by the electric conductivity meter 17 provided to a sample cell 16 and the measured value is sent to the control part C as a signal. In the control part C, the concentration of sulfuric acid is calculated from a first calibration curve and the absorbancy. A second calibration curve is specified from the calculated concentration of sulfuric acid to measure the electric conductivity of the plating liquid to be measured and the concentration of sulfuric acid is calculated from the measured value and the second calibration curve.
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Inventors:
Hiroshi Mizohata
Roof Go
Roof Go
Application Number:
JP2001190813A
Publication Date:
November 08, 2006
Filing Date:
June 25, 2001
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01N33/20; C25D3/38; C25D7/06; C25D21/12; G01N21/27; G01N21/35; G01N21/3577; G01N21/359; G01N27/06; (IPC1-7): G01N33/20; C25D3/38; C25D7/06; C25D21/12; G01N21/27; G01N21/35; G01N27/06
Domestic Patent References:
JP3079794A | ||||
JP8027149A | ||||
JP61091397A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki
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