METHOD FOR MEASURING DOSE OF ELECTRON BEAM AND DEVICE FOR ELECTRON BEAM IRRADIATION TREATMENT

Japanese Patent JP3904380

B2

PROBLEM TO BE SOLVED: To precisely measure the dose of an electron beam outputted from an electron beam(EB) tube and to adjust the dose of the electron beam radiated onto an object to a constant value under control.
SOLUTION: A device for measuring the dose of an electron beam, that consists of a current detecting component 11a and a current measuring component 11b, is placed near the outside of a window 1b of the EB tube 1. The surface of the current detecting component 11a, which is composed of a conductor or a semiconductor, is coated with an insulant coating of a prescribed thickness. Some electrons in the electron beam emitted from the window 1d of the EB tube 1 are caught by the current detecting component 11a to generate a current in it. The generated current is sent from the current measuring component 11b to a controlling component 12, for example, which adjusts the dose of the electron beam emitted from the EB tube 1 to a constant value under control by controlling a filament power source 3. Since a conductor or a semiconductor coated with an insulating film is used as the current detecting component 11a, the dose of the electron beam outputted from the EB tube 1 can be measured precisely, without being affected by a suspended electric charge near the current detecting component 11a.

JP2002231174	ELECTRON BEAM DEVICE, AND METHOD FOR MANUFACTURING DEVICE USING THE SAME DEVICE
JPH01146297	DEVICE FOR CHARGED PARTICLE

Minoru Komori
Masanori Yamaguchi

JP2000291545A

April 11, 2007

September 26, 2000

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Ushio, Inc.

G21K5/04; (IPC1-7): G21K5/04

JP1090423A
JP1090499A

Shunichiro Nagasawa

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