Title:
METHOD FOR MEASURING INCLINATION OF ROTARY SHAFT AND METHOD FOR ADJUSTING INCLINATION OF ROTARY SHAFT
Document Type and Number:
Japanese Patent JP2000131054
Kind Code:
A
Abstract:
To easily measure and adjust the inclination of two rotary shafts in a small space.
A flat-plate jig disk 47 is mounted on a spindle motor 39, a jig arm 48 is mounted on a rotary positioner, and the relative displacement of the inner/outer periphery of a disk 40 is measured in two directions of x and y while rotating the disk 40 and the inclination angle and direction of the spindle motor 39 and the rotary positioner 34 are calculated. A partial spherical surface 42 and a spherical surface seat 43 are mounted on a tilt stage 31 and a base plate 30, respectively, thus adjusting the tilt stage 31 with respect to the inclination of the base plate 30 via these.
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Inventors:
HIROSE KENJI
HAGIWARA HIROYUKI
SHIOMI HIROYUKI
KOIKE HIROSHI
HAGIWARA HIROYUKI
SHIOMI HIROYUKI
KOIKE HIROSHI
Application Number:
JP32452298A
Publication Date:
May 12, 2000
Filing Date:
October 29, 1998
Export Citation:
Assignee:
CANON KK
International Classes:
G01B7/00; G01B7/30; G01B11/26; G01B21/00; G01B21/22; (IPC1-7): G01B21/22; G01B7/00; G01B7/30; G01B11/26; G01B21/00
Attorney, Agent or Firm:
Hibiya Masahiko
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