To provide a nondestructive method for measuring the thickness of a ceramic film coating on a ceramic member which is formed with the ceramic film on a ceramic substrate, and to provide a device for measuring the thickness of the ceramic film capable of measuring the thickness of the film of the ceramic member without harming the film.
The measuring device for measuring thickness of the ceramic film formed on the ceramic member comprises: a work deck for placing a work to be measured having a curved shape; a photo-distance sensor for measuring the distance from a prescribed position in the inside surface of the member to be measured placed on the work deck to the photo-distance sensor; a rotational mechanism for rotating the photo-distance sensor; a sensor elevating mechanism for elevating the distance sensor by elevating the sensor rotational mechanism; and a sensor elevated position detection sensor for detecting the elevated position of the sensor elevation mechanism.
YAMAZAKI KEISUKE
YOOKAICHIYA MOTOO
Shunguchi Sekiguchi