Title:
METHOD FOR MODIFYING SURFACE OF INNER WALL OF VACUUM VESSEL
Document Type and Number:
Japanese Patent JP3864225
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize a vacuum vessel which stably keeps an atmosphere of superhigh vacuum pressure.
SOLUTION: This modifying method is characterized by forming a mixed film of copper and boron nitride on the surface of the inner wall of the vacuum vessel through simultaneous sputter deposition of copper and boron nitride with the use of a target made from a mixture of copper and boron nitride.
Inventors:
Masahiro Tosa
Tetsuo Oishi
Masahiro Goto
Akira Kasahara
Kazuhiro Yoshihara
Tetsuo Oishi
Masahiro Goto
Akira Kasahara
Kazuhiro Yoshihara
Application Number:
JP2002301077A
Publication Date:
December 27, 2006
Filing Date:
October 15, 2002
Export Citation:
Assignee:
National Institute for Materials Science
International Classes:
C23C14/06; C23C14/00; (IPC1-7): C23C14/06; C23C14/00
Domestic Patent References:
| JP2000178715A | ||||
| JP2233133A | ||||
| JP63199861A | ||||
| JP6330302A | ||||
| JP2905589B2 |