Title:
METHOD OF OPERATING VACUUM DEVICE ACCOMPANYING PRESSURE CHANGE
Document Type and Number:
Japanese Patent JP3965184
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To protect all members to be incorporated in a construction consisting of electronic device constituent members, transformer, motor, bearings, and a group of guide rolls which are confined in a vacuum chamber or a vacuum device and surrounded by an air permeative covering or housing against intrusive dust and other particles flying and being afloat when flooding from the operating pressure (vacuum) to the ambient pressure.
SOLUTION: Gas is introduced into the covering before flooding of the vacuum chamber, and therewith the solids consisting of a group of dust and particles is blown out of the covering so as to hinder the solids from intruding to inside the covering.
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Inventors:
Stephan Hein
Gunther Krem
Gunther Krem
Application Number:
JP2004364957A
Publication Date:
August 29, 2007
Filing Date:
December 16, 2004
Export Citation:
Assignee:
Applied Materials GmbH & Co.KG
International Classes:
B65H5/02; B65H5/06; B08B5/02; B08B5/04; B65H23/025; B65H27/00; C23C14/56; D06C3/06; D21G1/02; F16C13/00; H01L21/02; (IPC1-7): B65H5/02; B65H23/025; B65H27/00; F16C13/00
Domestic Patent References:
| JP10258404A | ||||
| JP62022529Y1 | ||||
| JP4226340A | ||||
| JP2003534458A | ||||
| JP62191352A |
Foreign References:
| WO2003100814A1 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
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