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Title:
METHOD OF POLISHING SUBSTRATE CRYSTAL FOR EPITAXIAL GROWTH
Document Type and Number:
Japanese Patent JPS52115169
Kind Code:
A
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Inventors:
ITOU KOUHEI
Application Number:
JP3132576A
Publication Date:
September 27, 1977
Filing Date:
March 24, 1976
Export Citation:
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Assignee:
HITACHI METALS LTD
International Classes:
H01L21/205; H01L21/20; H01L21/302; H01L21/304; (IPC1-7): H01L21/20; H01L21/302



 
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