Title:
高融点の金属の炭化物層を析出するための方法
Document Type and Number:
Japanese Patent JP4868534
Kind Code:
B2
Abstract:
The invention relates to a method for depositing layers of carbide of at least one high-fusion metal (3) on at least one object (8) using high-speed electron beam evaporation in a vacuum chamber (1). According to the invention: an atmosphere that contains carbon is created in said vacuum chamber (1) by the influx of a reactive gas; the high-fusion metal (3) is evaporated using an electron beam (5); the deposition is supported by a plasma, the latter being generated on the surface of the high-fusion metal (3) that is to be evaporated by means of a diffuse arc discharge; and the coating rate is at least 20 nm/s and the object temperature is maintained at between 50 DEG C and 500 DEG C during the deposition process.
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Inventors:
Jens-Peter Hains
Belt Scheffel
Christoph Metsner
Volker Kirchhoff
Matthias Tenbush
Belt Scheffel
Christoph Metsner
Volker Kirchhoff
Matthias Tenbush
Application Number:
JP2007508741A
Publication Date:
February 01, 2012
Filing Date:
February 23, 2005
Export Citation:
Assignee:
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
International Classes:
C23C14/24; C23C14/00; C23C14/06; C23C14/32; H01J37/32; H05H1/48
Domestic Patent References:
| JPS6096754A | 1985-05-30 | |||
| JPS63105960A | 1988-05-11 | |||
| JPH03232957A | 1991-10-16 | |||
| JPH05239630A | 1993-09-17 | |||
| JPH06264213A | 1994-09-20 | |||
| JP2000064028A | 2000-02-29 |
Foreign References:
| US5614273A | 1997-03-25 |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Einzel Felix-Reinhard
Takuya Kuno
Einzel Felix-Reinhard