Title:
透過電子顕微鏡観察用試料の作製方法
Document Type and Number:
Japanese Patent JP7424204
Kind Code:
B2
Abstract:
To provide a method for preparing a sample for transmission electron microscope observation which is used when a cross section of powder is observed by a transmission electron microscope, can be easily mounted on the transmission electron microscope, and can simply prepare a thin sample having a thickness suitable for measurement by the transmission electron microscope and a visual field area, and a transmission electron microscope.SOLUTION: A method for preparing a sample for transmission electron microscope observation includes: a step of filling a hole part provided on a sheet mesh that can be loaded in a sample holder of a transmission electron microscope with a composition containing a powder sample and a resin, curing the resin, and obtaining a cured sample; a step of loading the cured sample in an ion milling processing device so that the side face of the sheet mesh of the cured sample faces an ion gun; and a step of irradiating the composition of the cured sample and the sheet mesh with an argon ion flow, and thinning the composition to a thickness suitable for measurement by the transmission electron microscope.SELECTED DRAWING: Figure 4
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Inventors:
Satoru Takahashi
Application Number:
JP2020088528A
Publication Date:
January 30, 2024
Filing Date:
May 21, 2020
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
G01N1/06; G01N1/28; G01N1/32; H01J37/20; H01J37/305; H01J37/317
Domestic Patent References:
| JP2007047053A | ||||
| JP2006098189A | ||||
| JP2013195265A | ||||
| JP6132001A |
Foreign References:
| US20150255248 |
Attorney, Agent or Firm:
Masahiro Fukuoka
Setsuo Aniya
Setsuo Aniya
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