Title:
フォトレジスト製造用組成物の製造方法
Document Type and Number:
Japanese Patent JP5829952
Kind Code:
B2
Inventors:
Yoji Suzuki
Yasuyuki Akai
Yasuyuki Akai
Application Number:
JP2012049824A
Publication Date:
December 09, 2015
Filing Date:
March 06, 2012
Export Citation:
Assignee:
Daicel Corporation
International Classes:
G03F7/004; G03F7/031
Domestic Patent References:
| JP2009173560A | ||||
| JP2008032794A | ||||
| JP2007233230A | ||||
| JP2007206423A | ||||
| JP2005220097A |
Foreign References:
| WO2012043001A1 | ||||
| KR100212633B1 |
Attorney, Agent or Firm:
Yukihisa Goto