Title:
METHOD FOR PRODUCING CRYSTALLINE SUBSTANCE
Document Type and Number:
Japanese Patent JP2005330155
Kind Code:
A
Abstract:
To provide fluorite more improved in uniformity of refractive indices.
The production method employs a crystal production apparatus provided with a fluid circulation path for changing temperature near a seed crystal to define temperature control in the vicinity of the seed crystal, and a temperature sensor for observation is provided on the periphery of the fluid circulation path in a crucible descending method, where the length of the seed crystal is elongated, or the joint part between the seed crystal and a crystallization part is processed.
Inventors:
OYAMA YASUNAO
Application Number:
JP2004150341A
Publication Date:
December 02, 2005
Filing Date:
May 20, 2004
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; C30B11/00; C30B29/12; G02B1/02; H01L21/027; (IPC1-7): C30B11/00; C30B29/12; G02B1/02; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio