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Title:
METHOD FOR PRODUCING DUAL GRATING
Document Type and Number:
Japanese Patent JPH02270541
Kind Code:
A
Abstract:

PURPOSE: To reproduce grating on substrate side by a method wherein the grating is produced at positions, which lie on one straight line intersecting the center of the circle of a stamper and are symmetrical with each other, in such a manner that the direction of the groove is parallel or normal to said straight line so as to be coated with ultraviolet-curing resin in order to be exposed to ultraviolet rays under the state that substrate is brought into close contact with the surface of said resin.

CONSTITUTION: Grating 19 for front surface is produced at positions, which lie on one straight line 18 intersecting the center A of a stamper 17 installed on a rotary state and are symmetrical with each other, in such a manner that the direction of the groove of the grating is parallel or normal to the straight line 18. Laser beams emitted from a laser beam source 23 is irradiated over the grating 19 for front surface on the stamper 17. Only the stamper 17 is turned for fine adjustment so that reflected beams and diffracted and reflected beams reach to the straight line 30 described on a locus surface 29. Ultraviolet-curing resin 31 is applied on the grating 19 for front surface and, after that, a cover 21 is mounted over the stamper. Since a recess 22 is formed in the cover 21 at the part facing to the grating 19 for front surface, substrate 28 is positioned in the recess 22 so as to be brought into close contact with the ultraviolet-curing resin 31. By exposing the resin to ultraviolet beams under the state just mentioned above, the grating for front surface is reproduced in the substrate 28 side.


Inventors:
SUMI TAKESHI
Application Number:
JP9416789A
Publication Date:
November 05, 1990
Filing Date:
April 13, 1989
Export Citation:
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Assignee:
RICOH KK
International Classes:
B29D17/00; G02B5/18; G11B7/135; G11B7/26; (IPC1-7): B29D17/00
Domestic Patent References:
JPS62238502A1987-10-19
JPS63247941A1988-10-14
JPS60185904A1985-09-21
JPS63201603A1988-08-19
Attorney, Agent or Firm:
Akira Kashiwagi