Title:
METHOD FOR PRODUCING ELECTRICALLY CONDUCTIVE FIBER MATERIAL
Document Type and Number:
Japanese Patent JP2009084746
Kind Code:
A
Abstract:
To provide a method for producing an electrically conductive fiber material, which is capable of forming many carbon nanofibers 20 in a short time, where the carbon nanofibers exhibits desired performances in accordance with applications.
The method for producing carbon nanofibers 20 as the electrically conductive fiber material in a fibrous or tubular form includes film-forming an electrically conductive catalyst layer 12 having direct electrical conductivity on the surface of a substrate 11 made of silicon, heating the electrically conductive catalyst layer 12 and introducing a mixed gas around the layer 12 under a reduced-pressure atmosphere to generate a plasma so as to conduct a CVD (chemical vapor deposition).
Inventors:
YAMAGE MASASHI
KUBOI SHUICHI
KUBOI SHUICHI
Application Number:
JP2007256519A
Publication Date:
April 23, 2009
Filing Date:
September 28, 2007
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
D01F9/127; C01B31/02; H01B13/00; H01J29/04; H01J31/12; H01B1/04
Domestic Patent References:
JP2006012494A | 2006-01-12 | |||
JP2004359478A | 2004-12-24 | |||
JP2001240403A | 2001-09-04 | |||
JP2005350342A | 2005-12-22 | |||
JP2001048512A | 2001-02-20 | |||
JP2007051043A | 2007-03-01 | |||
JP2004067413A | 2004-03-04 | |||
JP2007142197A | 2007-06-07 | |||
JP2006012494A | 2006-01-12 | |||
JP2004359478A | 2004-12-24 | |||
JP2001240403A | 2001-09-04 | |||
JP2005350342A | 2005-12-22 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
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