Title:
膜形成用組成物の製造方法、膜形成用組成物および絶縁膜形成用材料
Document Type and Number:
Japanese Patent JP4411688
Kind Code:
B2
Inventors:
Nishikawa General Rules
Mayumi Kakuda
Sakako Hakazuka
Masahiko Ebisawa
Kinji Yamada
Mayumi Kakuda
Sakako Hakazuka
Masahiko Ebisawa
Kinji Yamada
Application Number:
JP15463099A
Publication Date:
February 10, 2010
Filing Date:
June 02, 1999
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08G77/06; H01L21/312; C08G77/18; C08G77/50; C08L83/04; C09D183/06; C09D183/14; H01B3/46
Domestic Patent References:
| JP8192097A | ||||
| JP7305028A | ||||
| JP8130247A | ||||
| JP3020377A | ||||
| JP2000309752A | ||||
| JP2000344892A | ||||
| JP2000344894A | ||||
| JP7097548A | ||||
| JP2000284101A | ||||
| JP28004940B1 |
Foreign References:
| WO1999023101A1 |