Title:
フッ素アルコール化合物の製造方法
Document Type and Number:
Japanese Patent JP4614092
Kind Code:
B2
Abstract:
Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R 1 is H or a monovalent C 1 -C 20 hydrocarbon group in which any -CH 2 - moiety may be replaced by -O- or -C(=O)-, R 2 is H or a monovalent C 1 -C 6 hydrocarbon group, R 3 and R 4 are H or a monovalent C 1 -C 8 hydrocarbon group, and M 1 is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.
R 3 M 1 (2)
R 4 M 1 (3)
Inventors:
Koji Hasegawa
Tsuyoshi Kanao
Tsunehiro Nishi
Masaki Ohashi
Takeshi Watanabe
Tsuyoshi Kanao
Tsunehiro Nishi
Masaki Ohashi
Takeshi Watanabe
Application Number:
JP2006022319A
Publication Date:
January 19, 2011
Filing Date:
January 31, 2006
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07C29/40; C07C31/42; C07C31/44; C07C69/653; C07C69/753; C08F20/24; C08F20/28; C08F32/08; G03F7/039; H01L21/027
Domestic Patent References:
| JP2004046098A | ||||
| JP2003040840A | ||||
| JP2002179624A | ||||
| JP2005239710A | ||||
| JP2006022259A |
Foreign References:
| WO2000017139A1 |
Other References:
SYNTHETIC COMMUNICATIONS,Vol.12, No. 6,p.463-7
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa