METHOD FOR PRODUCING HIGHLY PURE β-DIKETONATE COMPLEX OF ALKALINE-EARTH METAL AND HIGHLY PURE β-DIKETONATE COMPLEX FOR FORMING THIN FILM BY CHEMICAL VAPOR DEPOSITION METHOD

Japanese Patent JP3787125

B2

PROBLEM TO BE SOLVED: To produce a highly pure β-diketonate complex of an alkaline-earth metal useful as a raw material for forming thin layers by CVD (chemical vapor deposition) method.
SOLUTION: The method for producing the highly pure β-diketonate complex of the alkaline-earth metal is to mix an acetone solution of DPM (dipivaloylmethane) with an acetone solution of BaCl2, drop a methanol solution of NaOH under sufficient agitation and react DPM with Ba. Highly pure Ba(DPM)2 containing <0.01% evaporation of impurities and ≥99.5% evaporation of chelates detected by thermogravimetric analysis in vacuum as shown in figure 1 (C), and having 99.1-101.0% carbon content based on the theoretical value, 99.0-101.0% hydrogen content based on the theoretical value measured by elementary analysis and 99.0-101.0% metal content based on the theoretical value detected by ICP (Inductively-Coupled Plasmaspectrometer) analysis is obtained.

Ichizo Kobayashi
Yoshiaki Sugimori

JP2003103095A

June 21, 2006

March 13, 1992

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Taiyo Nippon Sanso Co., Ltd.

C07C45/77; C07C49/92; C07F3/02; C07F3/04; C23C16/40; (IPC1-7): C07C45/77; C07C49/92; C23C16/40; //C07F3/02; C07F3/04

JP5255855A

George S.HAMMOND, Derek C.NONHEBEL, Dhin-Hua S.WU,Chelates of β-Diketones. V. ,Inorganic Chemistry,米国,1963年,Vol.2, No.1,p.73-76

Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama

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