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Patent Searching and Data


Title:
METHOD FOR PRODUCING INK JET HEAD, INK JET HEAD AND INK JET RECORDER
Document Type and Number:
Japanese Patent JP2003276210
Kind Code:
A
Abstract:

To provide a method for producing an ink jet head in which failure of production is reduced through a production process for blocking progress of silicon etching and a silicon channel plate is provided while reducing the cost, and to provide an ink jet head and an ink jet recorder.

The method for producing an ink jet head comprises a step of forming a channel plate member of a silicon substrate by wet etching while differentiating the etching rate in the central part of the silicon substrate and at the circumferential part of edge, a step of forming a mask layer pattern of multilayer film on the silicon substrate, a step of forming a specified mask pattern required for forming a channel plate on the multilayer film on the opposite sides of a wafer through patterning and etching using a resist mask, and a step of performing wet etching using the patterned multilayer film as a mask material.


Inventors:
MIURA KUNIHIRO
UENO YOSHIKAZU
Application Number:
JP2002082399A
Publication Date:
September 30, 2003
Filing Date:
March 25, 2002
Export Citation:
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Assignee:
RICOH KK
International Classes:
B41J2/16; B41J2/045; B41J2/055; (IPC1-7): B41J2/16; B41J2/045; B41J2/055
Attorney, Agent or Firm:
Toshiro Kojima