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Title:
METHOD FOR PRODUCING MACROMOLECULAR COMPOUND FOR PHOTORESIST
Document Type and Number:
Japanese Patent JP2006199764
Kind Code:
A
Abstract:

To provide a method for producing a macromolecular compound for photoresist, affording good quality in the film-forming step of semiconductor production process when used as a resin component of a resin composition for the photoresist.

The method comprises the following process: Monomers essentially comprising a monomer A bearing such a group as to make the monomer soluble to an alkali on being eliminated by an acid and a monomer B having a polar group-containing alicyclic skeleton and a polymerization initiator are dissolved in a solvent followed by carrying out a polymerization while dripping the resultant solution into a solvent heated to the polymerization temperature. The resultant polymerization solution is added to a poor solvent(precipitating solvent) to precipitate the resultant polymer, which is centrifuged by a centrifugal separator at the centrifugal force of 400-700 G(G: acceleration of gravity) to remove the solvent. The resultant wet crystal is dissolved in a glycol-based solvent followed by distillation at reduced pressures to effect concentration to obtain the objective macromolecular compound in the form of a solution.


Inventors:
KANBARA SHIGEKI
KINOSHITA AKIRA
Application Number:
JP2005011035A
Publication Date:
August 03, 2006
Filing Date:
January 19, 2005
Export Citation:
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Assignee:
DAICEL CHEM
International Classes:
C08F2/06; C08F6/12; G03F7/033; G03F7/039
Foreign References:
WO2003082933A12003-10-09